# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | N. Herguedas and E. Carretero. Optical properties in mid-infrared range of silicon oxide thin films with different stoichiometries. Nanomaterials 13, 2749 (2023) COMMENTS: | SiO1.89. Sputtered Si with 80 sccm O2 and 120 sccm Ar, which is equivalent to a oxygen partial pressure of 5.9 × 10-4 mbar and a total pressure of 1.6 × 10-3 mbar. Room temperature. DATA: - type: tabulated nk data: | 5.000 1.332 0.001 5.005 1.332 0.001 5.010 1.332 0.001 5.015 1.331 0.001 5.020 1.331 0.001 5.025 1.331 0.001 5.030 1.331 0.001 5.035 1.330 0.001 5.040 1.330 0.001 5.045 1.330 0.001 5.051 1.330 0.001 5.056 1.329 0.001 5.061 1.329 0.001 5.066 1.329 0.001 5.071 1.328 0.001 5.076 1.328 0.001 5.081 1.328 0.001 5.086 1.327 0.001 5.092 1.327 0.001 5.097 1.327 0.001 5.102 1.327 0.001 5.107 1.326 0.001 5.112 1.326 0.001 5.118 1.326 0.001 5.123 1.325 0.001 5.128 1.325 0.001 5.133 1.325 0.001 5.139 1.324 0.001 5.144 1.324 0.001 5.149 1.324 0.001 5.155 1.324 0.001 5.160 1.323 0.001 5.165 1.323 0.001 5.171 1.323 0.001 5.176 1.322 0.001 5.181 1.322 0.002 5.187 1.322 0.002 5.192 1.321 0.002 5.198 1.321 0.002 5.203 1.321 0.002 5.208 1.320 0.002 5.214 1.320 0.002 5.219 1.320 0.002 5.225 1.319 0.002 5.230 1.319 0.002 5.236 1.319 0.002 5.241 1.318 0.002 5.247 1.318 0.002 5.252 1.318 0.002 5.258 1.317 0.002 5.263 1.317 0.002 5.269 1.317 0.002 5.274 1.316 0.002 5.280 1.316 0.002 5.285 1.316 0.002 5.291 1.315 0.002 5.297 1.315 0.002 5.302 1.315 0.002 5.308 1.314 0.002 5.313 1.314 0.002 5.319 1.313 0.002 5.325 1.313 0.002 5.330 1.313 0.002 5.336 1.312 0.002 5.342 1.312 0.002 5.348 1.312 0.002 5.353 1.311 0.002 5.359 1.311 0.002 5.365 1.310 0.002 5.371 1.310 0.002 5.376 1.310 0.002 5.382 1.309 0.002 5.388 1.309 0.002 5.394 1.309 0.002 5.400 1.308 0.002 5.405 1.308 0.002 5.411 1.307 0.002 5.417 1.307 0.002 5.423 1.307 0.002 5.429 1.306 0.002 5.435 1.306 0.002 5.441 1.305 0.002 5.447 1.305 0.002 5.453 1.305 0.002 5.459 1.304 0.002 5.464 1.304 0.002 5.470 1.303 0.002 5.476 1.303 0.002 5.482 1.302 0.002 5.488 1.302 0.002 5.495 1.302 0.002 5.501 1.301 0.002 5.507 1.301 0.002 5.513 1.300 0.002 5.519 1.300 0.002 5.525 1.299 0.002 5.531 1.299 0.002 5.537 1.299 0.002 5.543 1.298 0.002 5.549 1.298 0.002 5.556 1.297 0.002 5.562 1.297 0.002 5.568 1.296 0.002 5.574 1.296 0.002 5.580 1.295 0.002 5.587 1.295 0.002 5.593 1.294 0.002 5.599 1.294 0.002 5.605 1.294 0.002 5.612 1.293 0.002 5.618 1.293 0.002 5.624 1.292 0.002 5.631 1.292 0.002 5.637 1.291 0.002 5.643 1.291 0.002 5.650 1.290 0.002 5.656 1.290 0.002 5.663 1.289 0.002 5.669 1.289 0.002 5.675 1.288 0.002 5.682 1.288 0.002 5.688 1.287 0.002 5.695 1.287 0.002 5.701 1.286 0.002 5.708 1.286 0.002 5.714 1.285 0.002 5.721 1.285 0.002 5.727 1.284 0.002 5.734 1.283 0.002 5.741 1.283 0.002 5.747 1.282 0.002 5.754 1.282 0.002 5.760 1.281 0.002 5.767 1.281 0.002 5.774 1.280 0.002 5.780 1.280 0.002 5.787 1.279 0.003 5.794 1.278 0.003 5.800 1.278 0.003 5.807 1.277 0.003 5.814 1.277 0.003 5.821 1.276 0.003 5.828 1.276 0.003 5.834 1.275 0.003 5.841 1.274 0.003 5.848 1.274 0.003 5.855 1.273 0.003 5.862 1.273 0.003 5.869 1.272 0.003 5.875 1.271 0.003 5.882 1.271 0.003 5.889 1.270 0.003 5.896 1.270 0.003 5.903 1.269 0.003 5.910 1.268 0.003 5.917 1.268 0.003 5.924 1.267 0.003 5.931 1.266 0.003 5.938 1.266 0.003 5.945 1.265 0.003 5.952 1.264 0.003 5.959 1.264 0.003 5.967 1.263 0.003 5.974 1.262 0.003 5.981 1.262 0.003 5.988 1.261 0.003 5.995 1.260 0.003 6.002 1.260 0.003 6.010 1.259 0.003 6.017 1.258 0.003 6.024 1.258 0.003 6.031 1.257 0.003 6.039 1.256 0.003 6.046 1.255 0.003 6.053 1.255 0.003 6.061 1.254 0.003 6.068 1.253 0.003 6.075 1.252 0.003 6.083 1.252 0.003 6.090 1.251 0.003 6.098 1.250 0.003 6.105 1.249 0.003 6.112 1.249 0.003 6.120 1.248 0.003 6.127 1.247 0.003 6.135 1.246 0.003 6.143 1.245 0.003 6.150 1.245 0.003 6.158 1.244 0.004 6.165 1.243 0.004 6.173 1.242 0.004 6.180 1.241 0.004 6.188 1.241 0.004 6.196 1.240 0.004 6.203 1.239 0.004 6.211 1.238 0.004 6.219 1.237 0.004 6.227 1.236 0.004 6.234 1.235 0.004 6.242 1.235 0.004 6.250 1.234 0.004 6.258 1.233 0.004 6.266 1.232 0.004 6.274 1.231 0.004 6.281 1.230 0.004 6.289 1.229 0.004 6.297 1.228 0.004 6.305 1.227 0.004 6.313 1.226 0.004 6.321 1.225 0.004 6.329 1.224 0.004 6.337 1.223 0.004 6.345 1.222 0.004 6.353 1.221 0.004 6.361 1.220 0.004 6.369 1.219 0.004 6.378 1.218 0.004 6.386 1.217 0.004 6.394 1.216 0.004 6.402 1.215 0.004 6.410 1.214 0.004 6.418 1.213 0.005 6.427 1.212 0.005 6.435 1.211 0.005 6.443 1.210 0.005 6.452 1.209 0.005 6.460 1.208 0.005 6.468 1.206 0.005 6.477 1.205 0.005 6.485 1.204 0.005 6.494 1.203 0.005 6.502 1.202 0.005 6.510 1.201 0.005 6.519 1.200 0.005 6.527 1.198 0.005 6.536 1.197 0.005 6.545 1.196 0.005 6.553 1.195 0.005 6.562 1.193 0.005 6.570 1.192 0.005 6.579 1.191 0.005 6.588 1.190 0.005 6.596 1.188 0.005 6.605 1.187 0.005 6.614 1.186 0.006 6.623 1.184 0.006 6.631 1.183 0.006 6.640 1.182 0.006 6.649 1.180 0.006 6.658 1.179 0.006 6.667 1.177 0.006 6.676 1.176 0.006 6.684 1.174 0.006 6.693 1.173 0.006 6.702 1.172 0.006 6.711 1.170 0.006 6.720 1.169 0.006 6.729 1.167 0.006 6.739 1.165 0.006 6.748 1.164 0.006 6.757 1.162 0.006 6.766 1.161 0.007 6.775 1.159 0.007 6.784 1.158 0.007 6.793 1.156 0.007 6.803 1.154 0.007 6.812 1.153 0.007 6.821 1.151 0.007 6.831 1.149 0.007 6.840 1.147 0.007 6.849 1.146 0.007 6.859 1.144 0.007 6.868 1.142 0.007 6.878 1.140 0.007 6.887 1.138 0.007 6.897 1.136 0.008 6.906 1.135 0.008 6.916 1.133 0.008 6.925 1.131 0.008 6.935 1.129 0.008 6.944 1.127 0.008 6.954 1.125 0.008 6.964 1.123 0.008 6.974 1.121 0.008 6.983 1.118 0.008 6.993 1.116 0.008 7.003 1.114 0.009 7.013 1.112 0.009 7.022 1.110 0.009 7.032 1.107 0.009 7.042 1.105 0.009 7.052 1.103 0.009 7.062 1.100 0.009 7.072 1.098 0.009 7.082 1.096 0.009 7.092 1.093 0.010 7.102 1.091 0.010 7.112 1.088 0.010 7.123 1.086 0.010 7.133 1.083 0.010 7.143 1.080 0.010 7.153 1.078 0.010 7.163 1.075 0.010 7.174 1.072 0.011 7.184 1.069 0.011 7.194 1.066 0.011 7.205 1.063 0.011 7.215 1.060 0.011 7.225 1.057 0.011 7.236 1.054 0.012 7.246 1.051 0.012 7.257 1.048 0.012 7.267 1.045 0.012 7.278 1.041 0.012 7.289 1.038 0.012 7.299 1.035 0.013 7.310 1.031 0.013 7.321 1.028 0.013 7.331 1.024 0.013 7.342 1.020 0.014 7.353 1.016 0.014 7.364 1.013 0.014 7.375 1.009 0.014 7.386 1.005 0.015 7.396 1.001 0.015 7.407 0.996 0.015 7.418 0.992 0.015 7.429 0.988 0.016 7.440 0.983 0.016 7.452 0.979 0.016 7.463 0.974 0.017 7.474 0.969 0.017 7.485 0.964 0.017 7.496 0.959 0.018 7.508 0.954 0.018 7.519 0.949 0.019 7.530 0.943 0.019 7.541 0.938 0.020 7.553 0.932 0.020 7.564 0.926 0.021 7.576 0.920 0.022 7.587 0.914 0.022 7.599 0.907 0.023 7.610 0.901 0.024 7.622 0.894 0.025 7.634 0.887 0.026 7.645 0.879 0.027 7.657 0.872 0.028 7.669 0.864 0.029 7.680 0.856 0.031 7.692 0.848 0.032 7.704 0.840 0.034 7.716 0.831 0.036 7.728 0.822 0.038 7.740 0.812 0.040 7.752 0.802 0.042 7.764 0.792 0.045 7.776 0.782 0.048 7.788 0.771 0.051 7.800 0.760 0.055 7.812 0.749 0.059 7.825 0.737 0.063 7.837 0.725 0.068 7.849 0.712 0.074 7.862 0.699 0.080 7.874 0.686 0.087 7.886 0.672 0.094 7.899 0.658 0.102 7.911 0.644 0.112 7.924 0.630 0.122 7.937 0.615 0.133 7.949 0.601 0.145 7.962 0.586 0.159 7.974 0.572 0.174 7.987 0.558 0.190 8.000 0.545 0.207 8.013 0.533 0.226 8.026 0.521 0.246 8.039 0.511 0.267 8.052 0.502 0.289 8.065 0.495 0.312 8.078 0.489 0.335 8.091 0.485 0.358 8.104 0.483 0.381 8.117 0.482 0.405 8.130 0.482 0.427 8.143 0.483 0.450 8.157 0.486 0.471 8.170 0.489 0.492 8.183 0.494 0.513 8.197 0.499 0.532 8.210 0.505 0.551 8.224 0.511 0.569 8.237 0.518 0.586 8.251 0.525 0.603 8.264 0.533 0.618 8.278 0.541 0.633 8.292 0.549 0.647 8.306 0.556 0.661 8.319 0.564 0.673 8.333 0.572 0.685 8.347 0.580 0.696 8.361 0.588 0.706 8.375 0.595 0.716 8.389 0.602 0.726 8.403 0.608 0.734 8.418 0.614 0.743 8.432 0.620 0.750 8.446 0.624 0.758 8.460 0.628 0.765 8.475 0.632 0.772 8.489 0.634 0.778 8.503 0.636 0.785 8.518 0.637 0.792 8.532 0.637 0.799 8.547 0.636 0.806 8.562 0.634 0.814 8.576 0.632 0.822 8.591 0.628 0.831 8.606 0.623 0.841 8.621 0.618 0.852 8.636 0.611 0.864 8.651 0.605 0.878 8.666 0.597 0.893 8.681 0.589 0.910 8.696 0.582 0.929 8.711 0.574 0.950 8.726 0.566 0.973 8.741 0.560 0.998 8.757 0.554 1.024 8.772 0.549 1.053 8.787 0.545 1.084 8.803 0.543 1.117 8.818 0.543 1.151 8.834 0.545 1.187 8.850 0.550 1.224 8.865 0.556 1.262 8.881 0.565 1.301 8.897 0.577 1.341 8.913 0.591 1.381 8.929 0.608 1.421 8.945 0.627 1.462 8.961 0.649 1.502 8.977 0.674 1.542 8.993 0.702 1.582 9.009 0.732 1.620 9.025 0.765 1.658 9.042 0.800 1.695 9.058 0.838 1.730 9.074 0.878 1.764 9.091 0.921 1.796 9.107 0.966 1.826 9.124 1.013 1.854 9.141 1.062 1.880 9.158 1.113 1.904 9.174 1.166 1.925 9.191 1.220 1.944 9.208 1.276 1.960 9.225 1.333 1.973 9.242 1.391 1.984 9.259 1.450 1.991 9.276 1.509 1.995 9.294 1.569 1.996 9.311 1.630 1.995 9.328 1.690 1.990 9.346 1.750 1.981 9.363 1.810 1.970 9.381 1.870 1.955 9.398 1.929 1.938 9.416 1.986 1.917 9.434 2.043 1.893 9.452 2.098 1.867 9.470 2.152 1.837 9.488 2.204 1.805 9.506 2.254 1.770 9.524 2.301 1.733 9.542 2.347 1.694 9.560 2.391 1.652 9.579 2.431 1.609 9.597 2.470 1.563 9.615 2.505 1.517 9.634 2.538 1.468 9.653 2.568 1.419 9.671 2.595 1.369 9.690 2.619 1.318 9.709 2.641 1.266 9.728 2.659 1.214 9.747 2.674 1.161 9.766 2.687 1.109 9.785 2.697 1.057 9.804 2.704 1.005 9.823 2.708 0.954 9.843 2.709 0.904 9.862 2.709 0.854 9.881 2.705 0.806 9.901 2.700 0.758 9.921 2.692 0.712 9.940 2.682 0.668 9.960 2.670 0.625 9.980 2.657 0.583 10.000 2.642 0.543 10.020 2.625 0.505 10.040 2.607 0.469 10.060 2.588 0.434 10.081 2.568 0.401 10.101 2.547 0.370 10.121 2.526 0.341 10.142 2.503 0.314 10.163 2.481 0.288 10.183 2.458 0.264 10.204 2.434 0.242 10.225 2.411 0.222 10.246 2.388 0.203 10.267 2.364 0.186 10.288 2.341 0.170 10.309 2.318 0.156 10.331 2.296 0.143 10.352 2.273 0.131 10.373 2.252 0.120 10.395 2.230 0.111 10.417 2.210 0.102 10.438 2.189 0.094 10.460 2.170 0.088 10.482 2.151 0.082 10.504 2.132 0.076 10.526 2.114 0.072 10.549 2.097 0.068 10.571 2.080 0.064 10.593 2.063 0.061 10.616 2.048 0.059 10.638 2.032 0.056 10.661 2.018 0.055 10.684 2.003 0.053 10.707 1.990 0.052 10.730 1.976 0.051 10.753 1.963 0.050 10.776 1.951 0.049 10.799 1.938 0.049 10.823 1.926 0.049 10.846 1.915 0.048 10.870 1.904 0.048 10.893 1.893 0.048 10.917 1.882 0.049 10.941 1.871 0.049 10.965 1.861 0.049 10.989 1.851 0.050 11.013 1.841 0.050 11.038 1.831 0.051 11.062 1.821 0.052 11.086 1.812 0.053 11.111 1.802 0.053 11.136 1.793 0.055 11.161 1.783 0.056 11.186 1.774 0.057 11.211 1.765 0.059 11.236 1.756 0.061 11.261 1.747 0.063 11.287 1.737 0.065 11.312 1.728 0.067 11.338 1.719 0.070 11.364 1.710 0.073 11.390 1.701 0.076 11.416 1.692 0.080 11.442 1.683 0.084 11.468 1.675 0.089 11.494 1.666 0.094 11.521 1.658 0.100 11.547 1.650 0.106 11.574 1.642 0.112 11.601 1.635 0.119 11.628 1.628 0.127 11.655 1.621 0.135 11.682 1.615 0.144 11.710 1.610 0.153 11.737 1.605 0.163 11.765 1.602 0.173 11.792 1.599 0.183 11.820 1.597 0.194 11.848 1.596 0.204 11.876 1.596 0.215 11.905 1.597 0.226 11.933 1.599 0.236 11.962 1.603 0.246 11.990 1.607 0.256 12.019 1.612 0.265 12.048 1.619 0.273 12.077 1.626 0.281 12.107 1.633 0.287 12.136 1.642 0.293 12.165 1.651 0.298 12.195 1.660 0.301 12.225 1.670 0.304 12.255 1.680 0.305 12.285 1.690 0.305 12.315 1.700 0.305 12.346 1.709 0.303 12.376 1.718 0.300 12.407 1.727 0.296 12.438 1.736 0.291 12.469 1.743 0.285 12.500 1.750 0.279 12.531 1.757 0.272 12.563 1.762 0.264 12.594 1.767 0.256 12.626 1.771 0.247 12.658 1.774 0.239 12.690 1.776 0.230 12.723 1.778 0.221 12.755 1.778 0.212 12.788 1.778 0.203 12.821 1.777 0.194 12.853 1.775 0.185 12.887 1.773 0.177 12.920 1.770 0.169 12.953 1.767 0.161 12.987 1.763 0.154 13.021 1.759 0.147 13.055 1.754 0.141 13.089 1.749 0.135 13.123 1.744 0.130 13.158 1.738 0.125 13.193 1.733 0.120 13.228 1.727 0.116 13.263 1.721 0.112 13.298 1.715 0.109 13.333 1.709 0.106 13.369 1.704 0.103 13.405 1.698 0.101 13.441 1.692 0.099 13.477 1.686 0.097 13.514 1.681 0.096 13.550 1.675 0.095 13.587 1.670 0.094 13.624 1.665 0.093 13.661 1.660 0.092 13.699 1.655 0.092 13.736 1.650 0.092 13.774 1.645 0.092 13.812 1.641 0.091 13.850 1.636 0.092 13.889 1.632 0.092 13.928 1.627 0.092 13.966 1.623 0.092 14.006 1.619 0.093 14.045 1.615 0.093 14.085 1.611 0.093 14.124 1.607 0.094 14.164 1.603 0.094 14.205 1.600 0.095 14.245 1.596 0.096 14.286 1.592 0.096 14.327 1.589 0.097 14.368 1.585 0.098 14.409 1.582 0.098 14.451 1.578 0.099 14.493 1.575 0.100 14.535 1.572 0.101 14.577 1.568 0.101 14.620 1.565 0.102 14.663 1.562 0.103 14.706 1.559 0.104 14.749 1.555 0.105 14.793 1.552 0.106 14.837 1.549 0.107 14.881 1.546 0.107 14.925 1.543 0.108 14.970 1.540 0.109 15.015 1.537 0.110 15.060 1.533 0.111 15.106 1.530 0.112 15.152 1.527 0.113 15.198 1.524 0.114 15.244 1.521 0.115 15.291 1.518 0.116 15.337 1.515 0.117 15.385 1.512 0.119 15.432 1.509 0.120 15.480 1.506 0.121 15.528 1.503 0.122 15.576 1.500 0.123 15.625 1.497 0.124 15.674 1.493 0.125 15.723 1.490 0.127 15.773 1.487 0.128 15.823 1.484 0.129 15.873 1.481 0.130 15.924 1.478 0.132 15.974 1.475 0.133 16.026 1.471 0.134 16.077 1.468 0.135 16.129 1.465 0.137 16.181 1.462 0.138 16.234 1.458 0.140 16.287 1.455 0.141 16.340 1.451 0.142 16.393 1.448 0.144 16.447 1.445 0.145 16.502 1.441 0.147 16.556 1.438 0.148 16.611 1.434 0.150 16.667 1.430 0.152 16.722 1.427 0.153 16.779 1.423 0.155 16.835 1.419 0.157 16.892 1.415 0.158 16.949 1.411 0.160 17.007 1.407 0.162 17.065 1.403 0.164 17.123 1.399 0.165 17.182 1.395 0.167 17.241 1.390 0.169 17.301 1.386 0.171 17.361 1.381 0.173 17.422 1.376 0.175 17.483 1.372 0.178 17.544 1.367 0.180 17.606 1.362 0.182 17.668 1.356 0.184 17.730 1.351 0.187 17.794 1.346 0.189 17.857 1.340 0.192 17.921 1.334 0.194 17.986 1.328 0.197 18.051 1.322 0.200 18.116 1.315 0.203 18.182 1.308 0.206 18.248 1.301 0.209 18.315 1.294 0.212 18.382 1.287 0.216 18.450 1.279 0.219 18.519 1.270 0.223 18.587 1.262 0.227 18.657 1.252 0.232 18.727 1.243 0.236 18.797 1.233 0.241 18.868 1.222 0.246 18.939 1.211 0.252 19.011 1.198 0.258 19.084 1.186 0.265 19.157 1.172 0.272 19.231 1.158 0.280 19.305 1.142 0.289 19.380 1.126 0.300 19.455 1.108 0.311 19.531 1.090 0.325 19.608 1.070 0.340 19.685 1.049 0.358 19.763 1.028 0.378 19.841 1.006 0.402 19.920 0.984 0.430 20.000 0.962 0.462 20.080 0.941 0.499 20.161 0.923 0.540 20.243 0.907 0.586 20.325 0.896 0.637 20.408 0.890 0.691 20.492 0.891 0.748 20.576 0.897 0.807 20.661 0.911 0.867 20.747 0.931 0.926 20.833 0.958 0.984 20.921 0.991 1.040 21.008 1.030 1.093 21.097 1.074 1.142 21.186 1.123 1.188 21.277 1.177 1.228 21.368 1.235 1.264 21.459 1.296 1.295 21.552 1.360 1.319 21.645 1.426 1.338 21.739 1.493 1.351 21.834 1.561 1.357 21.930 1.630 1.357 22.026 1.697 1.351 22.124 1.764 1.339 22.222 1.828 1.321 22.321 1.890 1.297 22.422 1.949 1.268 22.523 2.004 1.234 22.624 2.055 1.196 22.727 2.102 1.154 22.831 2.143 1.109 22.936 2.180 1.061 23.041 2.211 1.011 23.148 2.237 0.960 23.256 2.258 0.909 23.364 2.273 0.857 23.474 2.283 0.806 23.585 2.289 0.755 23.697 2.289 0.707 23.810 2.286 0.660 23.923 2.279 0.615 24.038 2.268 0.574 24.155 2.255 0.535 24.272 2.239 0.499 24.390 2.221 0.466 24.510 2.202 0.437 24.631 2.181 0.411 24.752 2.159 0.388 24.876 2.138 0.368 25.000 2.116 0.350